Examples include the inner surfaces of micro-drilled holes, narrow gaps or complex free-form surfaces. The optical inspection technique offers a fast, contactless and wear-free way of measuring micro-structures and distances. Including at production speed, if required. Using fibre-optic sensors and miniature measuring probes, the layer position, drill hole depth and surface quality in MICROVIAS on multi-layer boards can be detected. Distance sensors are suitable for the detection, differentiation and measurement of objects using ultrasound. This new method uses tandem low-coherence interferometry and an optical fiber cut at an angle of 45°.
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